Journal of Vacuum Science and Technology B

ISSN 2166-2746AVS Science and Technology SocietyUnited States
ScopusPMCSCImagoJIFMatched via identifier

Journal overview

Journal identity
Titles
Journal of Vacuum Science and Technology B
Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics
J Vac Sci Technol B Nanotechnol Microelectron (abbreviated)
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B A V S AMER INST PHYSICS
Key identifiers
ISSN
2166-2746
2166-2746
eISSN
2166-2754
NLM ID
101585681
Publisher / basic metadata
Publisher
AVS Science and Technology Society
American Vacuum Society
Country
Language
English

Indexing & coverage

Current indexing summary
Scopus
Currently indexed

Scopus's Sources record lists this journal as active.

Indexing history
Coverage
2009–2026, 1991–1992
Indexing services (MEDLINE, Embase)
Not available
Bibliographic inclusion (PubMed)
Not available
Full-text availability (PMC — not an indexing service)
PMCCoverage available

Metrics

MetricYearValueQuartileRankSource
JIF20251.2Q412283JCR Impact Factor List 2025 — supplied dataset
SCImago Journal Rank (SJR) — 2025

Source: SCImago Journal & Country Rank — 2025 dataset. SJR is a metric published by SCImago, presented here as reported.

SJR
0.359
Best Quartile
Q3
H-index
131
Subject categories
  • Condensed Matter Physics — Q3
  • Electrical and Electronic Engineering — Q3
  • Electronic, Optical and Magnetic Materials — Q3
  • Instrumentation — Q3
  • Materials Chemistry — Q3
  • Process Chemistry and Technology — Q3
  • Surfaces, Coatings and Films — Q3
More metrics
Coverage
1991–1992, 2009–2026
Country
United States
Region
Northern America
Publisher
AVS Science and Technology Society
Open Access
No
Open Access (Diamond)
No
Total documents (current year)
174
Total documents (3 years)
547
Total references
5705
Total citations (3 years)
829
Citable documents (3 years)
543
Citations per document (2 years)
1.55
References per document
32.79
Source details
Match confidence
Confirmed — two independent ISSNs agree
Matched via ISSN(s)
2166-2746, 2166-2754
SCImago Source ID
21100329308
SCImago Rank (across all SCImago source types)
15345

Publication activity

Publication activity
SCImago
2025
174 observed publications
Latest publication activity observed
2025
Current-year activity
Recent publication activity observed

Evidence sources: SCImago. SCImago's count is a source-reported aggregate figure; Crossref/OpenAlex/PubMed counts are distinct article records JCF Labs observed via each provider's own free API — none is guaranteed to be that journal's complete output for the year, and providers may disagree (this is expected, not an error). See this journal's own source evidence above for full context.

Subjects & categories

Subjects / categories
Subject area (SCImago)
MeSH (PubMed)
Not available
Coverage / history
Scopus:2009-2026; 1991-1992
PMC:v.27(6) 2009 – v.42(2) 2024